1

Two-dimensional oxidation

Year:
1983
Language:
english
File:
PDF, 685 KB
english, 1983
3

Structural Effects on a Submicron Trench Process

Year:
1985
Language:
english
File:
PDF, 925 KB
english, 1985
10

A general solution method for two-dimensional nonplanar oxidation

Year:
1983
Language:
english
File:
PDF, 670 KB
english, 1983